Introduction to Nano-Mechatronics (MCT-321)

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​8&9 Cont.

Title

Course Introduction
Scaling Laws
​Review on MEMS-IC Fabrication Processes
​MEMS Bulk Micromachining
​SOI and Surface MEMS Micromachining
​Microstructures
​Microstructures cont.
​Electrostatic Froces & Parallel Plat Actuators
​Damping in MEMS

Date

03/10/2015
10/10/2015
​17/10/2015
​14/11/2015
​21/11/2015
​28/11/2015
​12/12/2015
​12/12/2015
19/12/2015​

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