Introduction to Nano-Mechatronics (MCT-321)

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Course Meeting Times:
Lectures: 2 sessions/week, 50 mins/session
Sections: 1 session/week, 50 mins/session
Labs: 1 lab/week

Goals

• To provide students with foundational background, methods of fabrication, and mechanisms of operation of modern MEMS-based sensors and actuators along with their measuring instruments in different fields of application.
• To introduce the students to basic MEMS design.
• To introduce the students to design different MEMS-based measurement systems, inertial sensing systems, pressure sensing systems, …etc
  
  

Recommended Textbooks:

• Class Notes.
• Additional reading from different sources is encouraged.

Examinations:
There will be a mid-term exam scheduled after  Lecture 10. The final exam is 3 hours long.

Sections:
The purpose of the recitations is to give students experience in the subject by working out examples and expanding on the material presented in the lectures. Attendance and participation in the recitations is obligatory.

Homework:
Homework problems will typically be assigned every Section and will be due as specified in the assignments section. The problem sets will be provided in the assignments section. Late homework will be accepted but with maximum of half the grade given.
You may discuss the problems with others in class, but you must (a) write up your eventual solution independently, and (b) list the names of students with whom you discussed the problem set.

Grading:

• Final Exam: 40 %
  
• Mid Term exam: 20%
  
• Project: 25%
  
• Attendance: 5%
  
• Assignments: 10%
• Quizzes: 10%
  

List of Topics:

1. Introduction to MEMS
   
2. MEMS Scaling Laws
   
3. Microfabrication Processes
   
4. Microfabrication Technology, Bulk micromachining
   
5. Microfabrication Technology, Surface micromachining
   
6. Micromachining Technology, Silicon On Insulator (SOI)
   
7. MEMS Electromechanics, Microstructures
   
8. MEMS Electromechanics, Damping
   
9. Microactuators
   • Capacitive Actuation
   • Thermal Actuation
10. Micro Sensors
11. Applications.