Introduction to Nano-Mechatronics (MCT-321)
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Course Description:
By the end of this course, the student should be able to: • Identify fast growing areas in MEMS fields. • Appreciate the advantages and challenges of building electro-mechanical devices at the micro-scale. • Recognize sensing and actuation mechanisms applicable to MEMS. • Understand the basic design and operation of MEMS devices. • Understand the major manufacturing technologies for MEMS. |