Introduction to Nano-Mechatronics (MCT-321)
By the end of this course, the student should be able to:
• Identify fast growing areas in MEMS fields.
• Appreciate the advantages and challenges of building electro-mechanical devices at the micro-scale.
• Recognize sensing and actuation mechanisms applicable to MEMS.
• Understand the basic design and operation of MEMS devices.
• Understand the major manufacturing technologies for MEMS.