Electronics For Instrumentation (ECE-496)

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Title

Course Introduction
Scaling Laws
Review on MEMS-IC Fabrication Processes
Review on MEMS Technologies
Simple Beam Theory and Microstructures
2nd Order Systems
Damping in MEMS
Introduction to FEA and ANSYS
Electrostatic Forces and Parallel Plate Actuators
MEMS inertial gyroscopes

Date

09/02/2015
16/02/2015
16/02/2015
23/02/2015
09/03/2015
16/03/2015
16/03/2015
30/03/2015
06/04/2015
20/04/2015

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