Electronics For Instrumentation (ECE-496)

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Course Meeting Times:
Lectures: 1.5 sessions/week, 1.5 hours/session
Sections:  session / 2 weeks, 1.5 hours/session

Goals

• To provide students with foundational background, methods of fabrication, and mechanisms of operation of modern MEMS-based sensors and actuators along with their measuring instruments in different fields of application.
  
• To introduce the students to basic MEMS design.
• To introduce the students to design different MEMS-based measurement systems, inertial sensing systems, pressure sensing systems, …etc.
  

5% - Quizzes
Related Courses
After this course, related courses include:
Mechatronics(2) (MDP-454)
Project (MDP-499)

Recommended Textbooks:

• Class Notes.
• Additional reading from different sources is encouraged.

Examinations:
There will be a mid-term exam scheduled after  Lecture 10. The final exam is 3 hours long.

Sections:
The purpose of the recitations is to give students experience in the subject by working out examples and expanding on the material presented in the lectures. Attendance and participation in the recitations is obligatory.

Homework:
Homework problems will typically be assigned every Section and will be due as specified in the assignments section. The problem sets will be provided in the assignments section. Late homework will be accepted but with maximum of half the grade given.
You may discuss the problems with others in class, but you must (a) write up your eventual solution independently, and (b) list the names of students with whom you discussed the problem set.

Grading:

• 15% - Midterm Exam
• 10% - Project

• 70% - Final Exam

List of Topics:

1. Course introduction and Introduction to MEMS
2. MEMS Scaling Laws
3. Micromachining technology, bulk, surface, and Silicon On Insulator (SOI)
4. MEMS Electromechanics, Microstructures
5. MEMS Electromechanics, Damping
6. Time and frequency responses of 2nd order systems
7. Microactuators
8. Capacitive actuation
9. Thermal actuation
10. Sensors
11. Capacitive, Thermal, Piezoelectric, Piezoresistive sensing
12. Inertial and pressure measurement systems.